I found the problem with md5sum (and probably nfs, as well). One of the memory modules in the server was bad. The problem with XFS persists. Every time tar tried to create the directory:
/RAID/Server-Main/Equipment/Drive Controllers/HighPoint Adapters/Rocket 2722/Driver/RR276x/Driver/Linux/openSUSE/rr276x-suse-11.2-i386/linux/suse/i386-11.1
It would begin spitting out errors, starting with "Cannot mkdir: Structure needs cleaning". At that point, XFS had shut down. I went into /RAID/Server-Main/Equipment/Drive Controllers/HighPoint Adapters/Rocket 2722/Driver/RR276x/Driver/Linux/openSUSE/rr276x-suse-11.2-i386/linux/suse/ and created the i386-11.1 directory by hand, and tar no longer starts spitting out errors at that point, but it does start up again at RR2782/Windows/Vista-Win2008-Win7-legacy_single/x64.
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